New nanoimprint capability

The University of Bath has recently installed an EVG620 Semi-automated Nano-imprint Lithography system in itsĀ David Bullett Nanofabrication Cleanroom.

Equipped with top-side alignment and the latest SmartNIL (TM) technology for UV-NIL, this system is capable of replicating nanoscale features from small masters of a few mm up to 150 mm wafers.